Date: 18 Jul 2001

X-Ray Diffraction and X-Ray Reflectivity Applied to Investigation of Thin Films

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Abstract

An overview of X-ray scattering methods used for analysis of the real structure of thin films is presented that includes conventional diffraction, glancing angle X-ray diffraction, X-ray reflectivity measurement and grazing incidence X-ray diffraction. The capability of the above techniques is illustrated on two typical examples: investigation of real structure of polycrystalline thin films and study of interface morphology and atomic ordering in periodic multilayers.