Testable Design and Testing of Microsystems

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The low internal node accessibility of microsystems and the variety of components and technologies used in these systems can be considered as a real challenge for testing these devices. Although many concepts can be applied which have already been developed for testing boards and ICs, also new aspects like sensor/actuator testing have to be considered. The choice which of the many approaches is most adequate turns out to be very application dependent. Test approaches are shown for two microsystems