The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS) and Nanotechnology.
MEMS combine mechanical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. Nanotechnology builds on the detailed properties of matter to create new functionality at the atomic and molecular scale.
This series will strive to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner.
The list of topics planned for the series is still growing.
Here is a sample:
9 Volumes from 2008 – 2011Browse All Volumes