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Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes

  • Book
  • © 2016

Overview

Authors:
  1. Nong Moon Hwang

    1. Material Science and Engineering, Seoul National University, Seoul, Korea (Republic of)

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  • Provides a unique new insight into charged nanoparticles
  • Covers the new field of non-classical crystallization
  • Written by one of the leaders in the field
  • Includes supplementary material: sn.pub/extras

Part of the book series: Springer Series in Surface Sciences (SSSUR, volume 60)

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Table of contents (14 chapters)

  1. Front Matter

    Pages i-xii
    Download chapter PDF

  2. Non-classical Crystallization

    • Nong Moon Hwang
    Pages 1-20

  3. Thermodynamics of Physical and Chemical Vapour Deposition

    • Nong Moon Hwang
    Pages 21-50

  4. Nucleation

    • Nong Moon Hwang
    Pages 51-71

  5. Growth

    • Nong Moon Hwang
    Pages 73-99

  6. Diamond Synthesis at Low Pressure

    • Nong Moon Hwang
    Pages 101-130

  7. Growth Mechanism of CVD Diamond

    • Nong Moon Hwang
    Pages 131-162

  8. Growth Mechanism of CVD Silicon

    • Nong Moon Hwang
    Pages 163-180

  9. Other Works Related to Non-classical Crystallization of Thin Films and Nanostructures

    • Nong Moon Hwang
    Pages 181-191

  10. Experimental Confirmation of Charged Nanoparticles During Atmospheric CVD Using Differential Mobility Analyser

    • Nong Moon Hwang
    Pages 193-222

  11. Experimental Confirmation of Charged Nanoparticles at Low Pressure

    • Nong Moon Hwang
    Pages 223-239

  12. Deposition Behavior of Charged Nanoparticles

    • Nong Moon Hwang
    Pages 241-259

  13. Bias Effect on Deposition Behaviour of Charged Nanoparticles

    • Nong Moon Hwang
    Pages 261-289

  14. Charge-Enhanced Kinetics

    • Nong Moon Hwang
    Pages 291-306

  15. Implications and Applications

    • Nong Moon Hwang
    Pages 307-329

  16. Back Matter

    Pages 331-332
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Keywords

About this book

This book provides a comprehensive introduction to a recently-developed approach to the growth mechanism of thin films and nanostructures via chemical vapour deposition (CVD). Starting from the underlying principles of the low pressure synthesis of diamond films, it is shown that diamond growth occurs not by individual atoms but by charged nanoparticles. This newly-discovered growth mechanism turns out to be general to many CVD and some physical vapor deposition (PVD) processes. This non-classical crystallization is a new paradigm of crystal growth, with active research taking place on growth in solution, especially in biomineralization processes. 


Established understanding of the growth of thin films and nanostructures is based around processes involving individual atoms or molecules. According to the author’s research over the last two decades, however, the generation of charged gas phase nuclei is shown to be the rule rather than the exception in the CVD process, and charged gas phase nuclei are actively involved in the growth of films or nanostructures. This new understanding is called the theory of charged nanoparticles (TCN). This book describes how the non-classical crystallization mechanism can be applied to the growth of thin films and nanostructures in gas phase synthesis.  


Based on the author’s graduate lecture course, the book is aimed at senior undergraduate and graduate students and researchers in the field of thin film and nanostructure growth or crystal growth. It is hoped that a new understanding of the growth processes of thin films and nanostructures will reduce trial-and-error in research and in industrial fabrication processes.

Authors and Affiliations

  • Material Science and Engineering, Seoul National University, Seoul, Korea (Republic of)

    Nong Moon Hwang

About the author

Prof. Hwang’s research interest is in the microstructure evolutions during material processing, especially, abnormal grain growth and thin film growth. The topics are approached both experimentally and theoretically, occasionally using computer simulation. The most focused work has been the theory of charged clusters, which is suggested as a new understanding of thin film growth. This topic is related to the growth mechanism of thin films and nanowires, nanotubes prepared by chemical vapor deposition. The size distribution of charged clusters or nanoparticles is measured by differential mobility analyzer (DMA). He published more than 100 papers in SCI-indexed journals

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