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Ion Beams in Materials Processing and Analysis

  • Book
  • © 2013

Overview

Authors:
  1. Bernd Schmidt

    1. Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

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  2. Klaus Wetzig

    1. Festkörper- und, Werkstoffforschung (IFW), Leibniz-Institute für, Dresden, Germany

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  • Offers comprehensive treatment of the use of ion beams in material science research

  • Includes numerous tables, graphs and illustrations that amplify the text

  • Provides optimization strategies for solid-state properties of functional materials

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Table of contents (7 chapters)

  1. Front Matter

    Pages i-ix
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  2. Introduction

    • Bernd Schmidt, Klaus Wetzig
    Pages 1-5

  3. Ion–Solid Interactions

    • Bernd Schmidt, Klaus Wetzig
    Pages 7-31

  4. Ion Beam Technology

    • Bernd Schmidt, Klaus Wetzig
    Pages 33-116

  5. Materials Processing

    • Bernd Schmidt, Klaus Wetzig
    Pages 117-251

  6. Ion Beam Preparation of Materials

    • Bernd Schmidt, Klaus Wetzig
    Pages 253-300

  7. Materials Analysis by Ion Beams

    • Bernd Schmidt, Klaus Wetzig
    Pages 301-376

  8. Special Ion Beam Applications in Materials Analysis Problems

    • Bernd Schmidt, Klaus Wetzig
    Pages 377-411

  9. Back Matter

    Pages 413-418
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Keywords

About this book

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.

Authors and Affiliations

  • Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

    Bernd Schmidt

  • Festkörper- und, Werkstoffforschung (IFW), Leibniz-Institute für, Dresden, Germany

    Klaus Wetzig

About the authors

Bernd Schmidt received his PhD in Physics at the State University of St. Petersburg (Russia) in 1976. Since 1994 he has been head of the Process Technology Division at the Helmholtz-Zentrum Dresden-Rossendorf, Germany. His research interests include semiconductor technology as well as ion implantation and the synthesis of nanostructures. He is author of the specialist book "Silicon Sensors" (1986) and of more than 150 refereed journal papers.

Klaus Wetzig received his PhD (1967) and postdoctoral (1973) degrees in Physics at the TU Dresden, Germany. From 1992 until his retirement in 2006 he was full professor of Materials Analysis at the TU Dresden and research director at the Leibniz Institute for Solid State and Materials Research Dresden (IFW). His research interests include materials analysis, nanostructures and particle-solid interactions. He is author of several specialist books and of more than 300 refereed journal papers.

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