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Table of contents (5 chapters)
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Front Matter
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Back Matter
Bibliographic Information
Book Title: Sputtering by Particle Bombardment I
Book Subtitle: Physical Sputtering of Single-Element Solids
Editors: Rainer Behrisch
Series Title: Topics in Applied Physics
DOI: https://doi.org/10.1007/3-540-10521-2
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1981
Softcover ISBN: 978-3-662-30888-2Published: 23 August 2014
eBook ISBN: 978-3-540-38514-1Published: 28 July 2005
Series ISSN: 0303-4216
Series E-ISSN: 1437-0859
Edition Number: 1
Number of Pages: XI, 284
Number of Illustrations: 19 b/w illustrations