Integrated Chemical Microsensor Systems in CMOS Technology

Authors:

ISBN: 978-3-540-23782-2 (Print) 978-3-540-27372-1 (Online)

Table of contents (6 chapters)

  1. Front Matter

    Pages I-IX

  2. No Access

    Book Chapter

    Pages 1-7

    Introduction

  3. No Access

    Book Chapter

    Pages 9-14

    Fundamentals of Chemical Sensing

  4. No Access

    Book Chapter

    Pages 15-27

    Microtechnology for Chemical Sensors

  5. No Access

    Book Chapter

    Pages 29-84

    Microfabricated Chemical Sensors

  6. No Access

    Book Chapter

    Pages 85-185

    CMOS Platform Technology for Chemical Sensors

  7. No Access

    Book Chapter

    Pages 187-192

    Outlook and Future Developments

  8. Back Matter

    Pages 193-229