2005

Excimer Laser Technology

Editors:

ISBN: 978-3-540-20056-7 (Print) 978-3-540-26667-9 (Online)

Table of contents (31 chapters)

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  1. Front Matter

    Pages I-XIX

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    Book Chapter

    Pages 1-7

    Introductory Remarks

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    Book Chapter

    Pages 8-21

    Historical Review of Excimer Laser Development

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    Book Chapter

    Pages 22-29

    Trends in Worldwide Excimer Laser Sales

  5. Fundamentals

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      Book Chapter

      Pages 33-40

      Some Fundamentals of Laser Physics

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      Book Chapter

      Pages 41-45

      Principles of Excimer Lasers

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      Book Chapter

      Pages 47-73

      Design and Technology of Excimer Lasers

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      Book Chapter

      Pages 75-80

      High-Repetition-Rate and High-Power Lasers

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      Book Chapter

      Pages 81-88

      High-Energy Lasers

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      Book Chapter

      Pages 89-103

      Excimer Lasers for Microlithography

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      Book Chapter

      Pages 105-117

      Laser Beam Characterization

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      Book Chapter

      Pages 119-126

      Optical Coatings for Excimer Laser Applications

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      Book Chapter

      Pages 127-136

      Small Structures with Large Excimer Lasers

  6. Applications

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      Book Chapter

      Pages 139-147

      Overview

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      Book Chapter

      Pages 149-154

      Ablation

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      Book Chapter

      Pages 155-186

      Micro-Machining

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      Book Chapter

      Pages 187-200

      Via Drilling

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      Book Chapter

      Pages 201-219

      Micro-Processing of Borosilicate Glass and Polymers

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      Book Chapter

      Pages 221-277

      F2-Laser Microfabrication for Photonics and Biophotonics

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      Book Chapter

      Pages 279-283

      Nano-Structuring with Femtosecond Excimer Laser Pulses

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      Book Chapter

      Pages 285-294

      Physical Aspects of Ultra-Fast UV Laser Transfer

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