Volume 106 2007

Rare Earth Oxide Thin Films

Editors:

ISBN: 978-3-540-35796-4 (Print) 978-3-540-35797-1 (Online)

Table of contents (24 chapters)

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    Book Chapter

    Pages 1-14

    Scientific and Technological Issues Related to Rare Earth Oxides: An Introduction

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    Book Chapter

    Pages 15-32

    Atomic Layer Deposition of Rare Earth Oxides

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    Book Chapter

    Pages 33-51

    MOCVD Growth of Rare Earth Oxides:The Case of the Praseodymium/Oxygen System

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    Book Chapter

    Pages 53-72

    Requirements of Precursors for MOCVDand ALD of Rare Earth Oxides

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    Book Chapter

    Pages 73-86

    Models for ALD and MOCVD Growthof Rare Earth Oxides

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    Book Chapter

    Pages 87-100

    Growth of Oxides with Complex Stoichiometry by the ALD Technique, Exemplified by Growth of La1–x Ca x MnO 3

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    Book Chapter

    Pages 101-114

    Molecular Beam Epitaxy of Rare-Earth Oxides

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    Book Chapter

    Pages 115-126

    Fabrication and Characterization of Rare Earth Scandate Thin Films Prepared by Pulsed Laser Deposition

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    Book Chapter

    Pages 127-142

    Film and Interface Layer Compositionof Rare Earth (Lu, Yb) Oxides Depositedby ALD

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    Book Chapter

    Pages 143-152

    Local Atomic Environment of High-κ Oxides on Silicon Probed by X-Ray Absorption Spectroscopy

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    Book Chapter

    Pages 153-177

    Local Structure, Composition and Electronic Properties of Rare Earth Oxide Thin Films Studied Using Advanced Transmission Electron Microscopy Techniques (TEM-EELS)

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    Book Chapter

    Pages 179-202

    Strain-Relief at Internal Dielectric Interfaces in High-k Gate Stacks with Transition Metal and Rare Earth Atom Oxide Dielectrics

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    Book Chapter

    Pages 203-223

    Electrical Characterization of Rare Earth Oxides Grown by Atomic Layer Deposition

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    Book Chapter

    Pages 225-246

    Dielectric Properties of Rare-Earth Oxides: General Trends from Theory

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    Book Chapter

    Pages 247-268

    Charge Traps in High-k Dielectrics: Ab Initio Study of Defects in Pr-Based Materials

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    Book Chapter

    Pages 269-283

    Experimental Determination of the Band Offset of Rare Earth Oxides on Various Semiconductors

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    Book Chapter

    Pages 285-311

    Band Edge Electronic Structure of Transition Metal/Rare Earth Oxide Dielectrics

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    Book Chapter

    Pages 313-329

    Electronic Structure and Band Offsetsof Lanthanide Oxides

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    Book Chapter

    Pages 331-343

    Electronic Structure of Rare Earth Oxides

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    Book Chapter

    Pages 345-365

    Rare Earth Oxides in Microelectronics

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