Electroceramic-Based MEMS

Fabrication-Technology and Applications

Editors:

ISBN: 978-0-387-23310-9 (Print) 978-0-387-23319-2 (Online)

Table of contents (15 chapters)

  1. Applications and Devices

    1. No Access

      Book Chapter

      Pages 3-17

      MEMS-Based Thin Film and Resonant Chemical Sensors

    2. No Access

      Book Chapter

      Pages 19-35

      Microactuators Based on Thin Films

    3. No Access

      Book Chapter

      Pages 37-48

      Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

    4. No Access

      Book Chapter

      Pages 49-79

      Thick-Film Piezoelectric and Magnetostrictive Devices

    5. No Access

      Book Chapter

      Pages 81-113

      Micromachined Infrared Detectors Based on Pyroelectric Thin Films

    6. No Access

      Book Chapter

      Pages 115-131

      RF Bulk Acoustic Wave Resonators and Filters

    7. No Access

      Book Chapter

      Pages 133-156

      High Frequency Tuneable Devices Based on Thin Ferroelectric Films

    8. No Access

      Book Chapter

      Pages 157-174

      MEMS for Optical Functionality

  2. Materials, Fabrication-Technology, and Functionality

    1. No Access

      Book Chapter

      Pages 177-197

      Ceramic Thick Films for MEMS

    2. No Access

      Book Chapter

      Pages 199-215

      Thin Film Piezoelectrics for MEMS

    3. No Access

      Book Chapter

      Pages 217-234

      Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices

    4. No Access

      Book Chapter

      Pages 235-324

      Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics

    5. No Access

      Book Chapter

      Pages 325-359

      Microfabrication of Piezoelectric MEMS

    6. No Access

      Book Chapter

      Pages 361-385

      Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics

    7. No Access

      Book Chapter

      Pages 387-410

      Low-Cost Patterning of Ceramic Thin Films