Book 2005

Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice

Editors:

ISBN: 978-0-387-23116-7 (Print) 978-0-387-23313-0 (Online)

Table of contents (15 chapters)

  1. Front Matter

    Pages i-xvii

  2. No Access

    Chapter

    Pages 1-12

    The Focused Ion Beam Instrument

  3. No Access

    Chapter

    Pages 13-52

    Ion - Solid Interactions

  4. No Access

    Chapter

    Pages 53-72

    Focused Ion Beam Gases for Deposition and Enhanced Etch

  5. No Access

    Chapter

    Pages 73-86

    Three-Dimensional Nanofabrication Using Focused Ion Beams

  6. No Access

    Chapter

    Pages 87-106

    Device Edits and Modifications

  7. No Access

    Chapter

    Pages 107-132

    The Uses of Dual Beam FIB in Microelectronic Failure Analysis

  8. No Access

    Chapter

    Pages 133-142

    High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy

  9. No Access

    Chapter

    Pages 143-172

    FIB for Materials Science Applications - a Review

  10. No Access

    Chapter

    Pages 173-200

    Practical Aspects of FIB Tem Specimen Preparation

  11. No Access

    Chapter

    Pages 201-228

    FIB Lift-Out Specimen Preparation Techniques

  12. No Access

    Chapter

    Pages 229-245

    A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method

  13. No Access

    Chapter

    Pages 247-268

    Dual-Beam (FIB-SEM) Systems

  14. No Access

    Chapter

    Pages 269-280

    Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS)

  15. No Access

    Chapter

    Pages 281-300

    Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy

  16. No Access

    Chapter

    Pages 301-327

    Application of FIB in Combination with Auger Electron Spectroscopy

  17. Back Matter

    Pages 329-357