1998

Tribology Issues and Opportunities in MEMS

Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997

Editors:

ISBN: 978-94-010-6121-6 (Print) 978-94-011-5050-7 (Online)

Table of contents (51 chapters)

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  1. Front Matter

    Pages i-xiv

  2. MEMS Fabrication Techniques

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      Pages 1-16

      MEMS R&D in Europe

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      Pages 17-29

      Integrated MEMS in Conventional CMOS

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      Pages 31-51

      Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review

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      Pages 53-72

      Microfabrication Technologies for High Performance Microactuators

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      Pages 73-84

      Surface Characterization of Non-Lithographic Micromachining

  3. MEMS Applications and Tribology Issues

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      Pages 85-94

      Biosensors and Microfluidic Systems

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      Pages 95-107

      Power MEMS Materials and Structures

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      Pages 109-120

      MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization

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      Pages 121-134

      New Technology and Applications at Lucas NovaSensor

  4. State-of-the-Art of Tribology: Macroscale Processes

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      Pages 135-148

      Rough Surface Characterization

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      Pages 149-156

      Frictional Instabilities

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      Pages 157-164

      Wear of Ceramics and Metals

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      Pages 165-174

      Mechanics of Wear: From Conventional Components to MEMS

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      Pages 175-183

      Rheological Modeling of Thin Film Lubrication

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      Pages 185-206

      Surface Roughness Induced Effects in Hydrodynamic Lubrication

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      Pages 207-228

      Transition from Elastohydrodynamic to Partial Lubrication

  5. State-of-the-Art of Tribology: Micro-to Nanoscale Processes

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      Pages 229-246

      Micro/Nanotribology: State of the Art and Its Applications

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      Pages 247-260

      Pulsed Force Mode: A new method for characterizing thin silane films by adhesive force measurements

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      Pages 261-271

      Formation of Nanometer-Scale Contacts to Viscoelastic Materials

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      Pages 273-284

      Nanotribology of Vapor-Phase Lubricants

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