Ion Beams in Nanoscience and Technology

Editors:

ISBN: 978-3-642-00622-7 (Print) 978-3-642-00623-4 (Online)

Table of contents (34 chapters)

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  1. Front Matter

    Pages i-xx

  2. Trends in nanoscience and technology

    1. Front Matter

      Pages 1-1

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      Book Chapter

      Pages 3-20

      Nanoscale Engineering in the Biosciences

    3. No Access

      Book Chapter

      Pages 21-35

      High Speed Electronics

    4. No Access

      Book Chapter

      Pages 37-65

      Surface Modification Using Reactive Landing of Mass-Selected Ions

  3. Basic ion-matter interactions in nanometre scale materials

    1. Front Matter

      Pages 67-67

    2. No Access

      Book Chapter

      Pages 69-86

      Basics of Ion Scattering in Nanoscale Materials

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      Book Chapter

      Pages 87-93

      Box 1: Stopping of Ions in Nanomaterials

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      Book Chapter

      Pages 95-101

      Box 2: Sputtering

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      Book Chapter

      Pages 103-105

      Box 3: Ion Ranges

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      Book Chapter

      Pages 107-127

      Computer Simulation Methods for Defect Configurations and Nanoscale Structures

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      Book Chapter

      Pages 129-145

      Characterising Nanoscale Crystal Perfection by Crystal Mapping

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      Book Chapter

      Pages 147-149

      Box 4: Interatomic Potential

  4. Ion beam characterisation of nanoscale materials

    1. Front Matter

      Pages 151-151

    2. No Access

      Book Chapter

      Pages 153-167

      Medium Energy Ion Scattering for Near Surface Structure and Depth Profiling

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      Book Chapter

      Pages 169-170

      Box 5: Surface Crystallography Terminology

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      Book Chapter

      Pages 171-183

      Thin Film Characterisation Using MeV Ion Beams

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      Book Chapter

      Pages 185-204

      Nanoscale Materials Defect Characterisation

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      Book Chapter

      Pages 205-210

      Box 6: Nanoscale Defects

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      Book Chapter

      Pages 211-217

      Box 7: Diagnostic Ion Beam Luminescence

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      Book Chapter

      Pages 219-235

      Nanomaterials Science with Radioactive Ion Beams

  5. Nanoscale materials processing with ion beams

    1. Front Matter

      Pages 237-237

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      Book Chapter

      Pages 239-249

      Nanocluster and Nanovoid Formation by Ion Implantation

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      Book Chapter

      Pages 251-263

      Plasma Etching and Integration with Nanoprocessing

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      Book Chapter

      Pages 265-290

      Focused Ion Beam Machining and Deposition

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