Silver Metallization

Stability and Reliability

ISBN: 978-1-84800-026-1 (Print) 978-1-84800-027-8 (Online)

Table of contents (7 chapters)

  1. Front Matter

    Pages i-xi

  2. No Access

    Book Chapter

    Pages 1-6

    Introduction

  3. No Access

    Book Chapter

    Pages 7-14

    Silver Thin Film Characterization

  4. No Access

    Book Chapter

    Pages 15-42

    Diffusion Barriers and Self-encapsulation

  5. No Access

    Book Chapter

    Pages 43-74

    Thermal Stability

  6. No Access

    Book Chapter

    Pages 75-81

    Silver Electromigration Resistance

  7. No Access

    Book Chapter

    Pages 83-111

    Integration Issues

  8. No Access

    Book Chapter

    Pages 113-120

    Summary

  9. Back Matter

    Pages 121-123