1998

Polycrystalline Silicon for Integrated Circuits and Displays

Authors:

ISBN: 978-1-4613-7551-7 (Print) 978-1-4615-5577-3 (Online)

Table of contents (6 chapters)

  1. Front Matter

    Pages i-xv

  2. No Access

    Book Chapter

    Pages 1-56

    Deposition

  3. No Access

    Book Chapter

    Pages 57-122

    Structure

  4. No Access

    Book Chapter

    Pages 123-162

    Dopant Diffusion and Segregation

  5. No Access

    Book Chapter

    Pages 163-194

    Oxidation

  6. No Access

    Book Chapter

    Pages 195-243

    Electrical Properties

  7. No Access

    Book Chapter

    Pages 245-316

    Applications

  8. Back Matter

    Pages 317-378