Volume 23 2013

Advanced Mechatronics and MEMS Devices

Editors:

ISBN: 978-1-4419-9984-9 (Print) 978-1-4419-9985-6 (Online)

Table of contents (12 chapters)

  1. Front Matter

    Pages i-xi

  2. No Access

    Book Chapter

    Pages 1-23

    Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor

  3. No Access

    Book Chapter

    Pages 25-52

    Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms

  4. No Access

    Book Chapter

    Pages 53-88

    Autocalibration of MEMS Accelerometers

  5. No Access

    Book Chapter

    Pages 89-98

    Miniaturization of Micromanipulation Tools

  6. No Access

    Book Chapter

    Pages 99-116

    Digital Microrobotics Using MEMS Technology

  7. No Access

    Book Chapter

    Pages 117-140

    Flexure-Based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches

  8. No Access

    Book Chapter

    Pages 141-163

    Micro-Tactile Sensors for In Vivo Measurements of Elasticity

  9. No Access

    Book Chapter

    Pages 165-178

    Devices and Techniques for Contact Microgripping

  10. No Access

    Book Chapter

    Pages 179-191

    A Wall-Climbing Robot with Biomimetic Adhesive Pedrail

  11. No Access

    Book Chapter

    Pages 193-206

    Development of Bioinspired Artificial Sensory Cilia

  12. No Access

    Book Chapter

    Pages 207-221

    Jumping Like an Insect: From Biomimetic Inspiration to a Jumping Minirobot Design

  13. No Access

    Book Chapter

    Pages 223-239

    Modeling and H PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System

  14. Back Matter

    Pages 241-249