Alternative Lithography

Unleashing the Potentials of Nanotechnology

Editors:

ISBN: 978-1-4613-4836-8 (Print) 978-1-4419-9204-8 (Online)

Table of contents (17 chapters)

  1. Front Matter

    Pages i-xxi

  2. No Access

    Book Chapter

    Pages 1-14

    Alternative Lithography

  3. No Access

    Book Chapter

    Pages 15-23

    Nanoimprint Lithography

  4. No Access

    Book Chapter

    Pages 25-45

    Viscoelastic Properties of Polymers

  5. No Access

    Book Chapter

    Pages 47-76

    Nanorheology

  6. No Access

    Book Chapter

    Pages 77-101

    Wafer Scale Nanoimprint Lithography

  7. No Access

    Book Chapter

    Pages 103-115

    Step and Stamp Imprint Lithography

  8. No Access

    Book Chapter

    Pages 117-137

    Step and Flash Imprint Lithography

  9. No Access

    Book Chapter

    Pages 139-165

    Using PDMS as a thermocurable resist for a mold assisted imprint process

  10. No Access

    Book Chapter

    Pages 167-180

    Molecules for Microcontact Printing

  11. No Access

    Book Chapter

    Pages 181-212

    Microcontact Printing Techniques

  12. No Access

    Book Chapter

    Pages 213-233

    Local Oxidation Nanolithography

  13. No Access

    Book Chapter

    Pages 235-248

    Combined Approaches for Nanoelectronic Device Fabrication

  14. No Access

    Book Chapter

    Pages 249-270

    Application of Nanoimprint Lithography in Magnetism

  15. No Access

    Book Chapter

    Pages 271-285

    Application of Microcontact Printing and Nanoimprint Lithography

  16. No Access

    Book Chapter

    Pages 287-296

    Optical Applications of Nanoimprint Lithography

  17. No Access

    Book Chapter

    Pages 297-303

    Biotechnology Applications of NIL

  18. No Access

    Book Chapter

    Pages 305-330

    Soft Lithography and Imprint-Based Techniques for Microfluidics and Biological Analysis

  19. Back Matter

    Pages 331-333