MEMS Vibratory Gyroscopes

Structural Approaches to Improve Robustness

Authors:

ISBN: 978-0-387-09535-6 (Print) 978-0-387-09536-3 (Online)

Table of contents (11 chapters)

  1. Front Matter

    Pages 1-11

  2. Fundamentals of Micromachined Vibratory Gyroscopes

    1. Front Matter

      Pages 1-1

    2. No Access

      Book Chapter

      Pages 1-14

      Introduction

    3. No Access

      Book Chapter

      Pages 1-26

      Fundamentals of Micromachined Gyroscopes

    4. No Access

      Book Chapter

      Pages 1-29

      Fabrication Technologies

    5. No Access

      Book Chapter

      Pages 1-38

      Mechanical Design of MEMS Gyroscopes

    6. No Access

      Book Chapter

      Pages 1-29

      Electrical Design of MEMS Gyroscopes

  3. Structural Approaches to Improve Robustness

    1. Front Matter

      Pages 1-1

    2. No Access

      Book Chapter

      Pages 1-43

      Linear Multi DOF Architecture

    3. No Access

      Book Chapter

      Pages 1-20

      Torsional Multi DOF Architecture

    4. No Access

      Book Chapter

      Pages 1-18

      Distributed Mass Architecture

    5. No Access

      Book Chapter

      Pages 1-21

      Conclusions and Future Trends

  4. Back Matter

    Pages 1-10