2010

Introductory MEMS

Fabrication and Applications

Authors:

ISBN: 978-0-387-09510-3 (Print) 978-0-387-09511-0 (Online)

Table of contents (13 chapters)

  1. Front Matter

    Pages i-xiii

  2. Fabrication

    1. Front Matter

      Pages 1-1

    2. No Access

      Book Chapter

      Pages 3-16

      Introduction

    3. No Access

      Book Chapter

      Pages 17-63

      The substrate and adding material to it

    4. No Access

      Book Chapter

      Pages 65-94

      Creating and transferring patterns—Photolithography

    5. No Access

      Book Chapter

      Pages 95-130

      Creating structures—Micromachining

    6. No Access

      Book Chapter

      Pages 131-153

      Solid mechanics

  3. Applications

    1. Front Matter

      Pages 155-155

    2. No Access

      Book Chapter

      Pages 157-165

      Thinking about modeling

    3. No Access

      Book Chapter

      Pages 167-210

      MEMS transducers—An overview of how they work

    4. No Access

      Book Chapter

      Pages 211-230

      Piezoresistive transducers

    5. No Access

      Book Chapter

      Pages 231-253

      Capacitive transducers

    6. No Access

      Book Chapter

      Pages 255-282

      Piezoelectric transducers

    7. No Access

      Book Chapter

      Pages 283-316

      Thermal transducers

    8. No Access

      Book Chapter

      Pages 317-368

      Introduction to microfluidics

  4. Laboratories

    1. Front Matter

      Pages 369-369

    2. No Access

      Book Chapter

      Pages 371-403

      Microfabrication laboratories

  5. Back Matter

    Pages 1-37