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Determining the young modulus of nanosize thickness coatings for MEMS from the results of static force spectroscopy

  • Proceedings of the XVII Russian Symposium on Scanning Electron Microscopy and Analytical Methods of Investigation Applied for Solid States Physics
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

A method for the nanoidentation of resistance coatings 1–100 nm thick and intended for use in microelectromechanical systems is proposed on the basis of atomic-force microscopy (AFM). The elastic moduli of the coatings are determined using three models of contact: the Hertz model, the Johnson-Kendall-Roberts model and the Makushkin model, with and without allowance for the influence of a solid substrate.

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Authors and Affiliations

  1. A.V. Lykov Heat and Mass Transfer Institute, National Academy of Sciences of Belarus, Minsk, 220072, Russia

    S. O. Abetkovskaya, S. A. Chizhik & I. V. Pogoskaya

  2. Institute of Micromechanics and Photonics, Warsaw University of Technology, Warsaw, 02-552, Poland

    Z. Rimuza, D. Yazhabek, M. Mikhalovski & Ya. Linke

Authors
  1. S. O. Abetkovskaya
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  2. S. A. Chizhik
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  3. I. V. Pogoskaya
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  4. Z. Rimuza
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  5. D. Yazhabek
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  6. M. Mikhalovski
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  7. Ya. Linke
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Corresponding author

Correspondence to S. O. Abetkovskaya.

Additional information

Original Russian Text © S.O. Abetkovskaya, S.A. Chizhik, I.V. Pogoskaya, Z. Rimuza, D. Yazhabek, M. Mikhalovski, Ya. Linke, 2012, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2012, Vol. 76, No. 9, pp. 1122–1124.

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Abetkovskaya, S.O., Chizhik, S.A., Pogoskaya, I.V. et al. Determining the young modulus of nanosize thickness coatings for MEMS from the results of static force spectroscopy. Bull. Russ. Acad. Sci. Phys. 76, 1009–1011 (2012). https://doi.org/10.3103/S1062873812090031

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  • DOI: https://doi.org/10.3103/S1062873812090031

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