Modeling of diffraction of electromagnetic waves on periodic inhomogeneities by a finite element method coupled with the Rayleigh expansion
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- Nesterenko, D.V. Optoelectron.Instrument.Proc. (2011) 47: 68. doi:10.3103/S8756699011010109
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Implementation of a coupled finite element method of modeling of diffraction of electromagnetic waves on periodic inhomogeneities on substrates and in free space is discussed. The region including a periodic distribution of permittivity and permeability is covered with a finite element mesh. The variational equation incorporating field values in mesh nodes is minimized in accordance with the finite element method. The Rayleigh expansion is applied to field values in homogeneous half-space domains below and above the calculation domain including the inhomogeneity. Numerical experiments are performed to analyze the solution convergence dependence on the element size.