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Modeling the focusing microlenses of an auger analyzer equipped with a CMA

  • Proceedings of the XXIV Russian Conference on Electron Microscopy (SEM-2012)
  • Published:
Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

A method for and the results from modeling a film probe-shaping lens satisfying stringent mass-dimensional requirements and intended for use as part of an Auger analyzer equipped with a CMA are presented. The optimized electron-optical characteristics of the lens (the distribution of effective potential and the geometry of the electrode space) are obtained.

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Authors and Affiliations

  1. Moscow Institute of Electronics and Mathematics, Moscow, 109028, Russia

    M. D. Belsky, B. G. Lvov & V. V. Rybalko

Authors
  1. M. D. Belsky
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  2. B. G. Lvov
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  3. V. V. Rybalko
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Corresponding author

Correspondence to M. D. Belsky.

Additional information

Original Russian Text © M.D. Belsky, B.G. Lvov, V.V. Rybalko, 2013, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2013, Vol. 77, No. 8, pp. 1059–1062.

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Belsky, M.D., Lvov, B.G. & Rybalko, V.V. Modeling the focusing microlenses of an auger analyzer equipped with a CMA. Bull. Russ. Acad. Sci. Phys. 77, 959–962 (2013). https://doi.org/10.3103/S1062873813080066

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  • DOI: https://doi.org/10.3103/S1062873813080066

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