Multilayer thin-film filters of extreme ultraviolet and soft X-ray spectral regions

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Abstract

Multilayer thin-film filters from different materi al pairs with spectral windows within the wavelength range 7n < 60 nm were developed. Optical characteristics of samples in the extreme ultraviolet, visible, and IR spectrum ranges were studied. Ultrathin freestanding Zr/Si large-aperture filters with transparencies up to 76% at 7n = 13 nm were manufactured for projection lithography test benches; variations in their properties during long-term thermal loads were studied.

Original Russian Text © B.A. Volodin, S.A. Gusev, M.N. Drozdov, S.Yu. Zuev, E.B. Klyuenkov, A.Ya. Lopatin, V.I. Luchin, A.E. Pestov, N.N. Salashchenko, N.N. Tsybin, N.I. Chkhalo, 2010, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2010, Vol. 74, No. 1, pp. 53-57.