Zirconia-based solid solutions—New materials of photoelectronics
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- Buzynin, A.N., Grishina, T.N., Kiselyov, T.V. et al. Opt. Mem. Neural Networks (2009) 18: 312. doi:10.3103/S1060992X09040109
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Prospects of application of zirconia- and hafhia-based solid solutions for development of new generation of photodetectors are considered. The directions of photoelectronics, in which these materials successfully can become alternative to conventional dielectrics, are defined. A number of technologies of deposition and etching of zirconium dioxide and fianite layers were approbated and optimum ones were chosen. Photosensitive structures with fianite and ZrO2 layers were produced.