Optical Memory and Neural Networks

, Volume 18, Issue 4, pp 312–321

Zirconia-based solid solutions—New materials of photoelectronics

  • A. N. Buzynin
  • T. N. Grishina
  • T. V. Kiselyov
  • L. A. Kosuhina
  • N. V. Kravchenko
  • E. E. Lomonova
  • V. A. Panov
  • M. S. Sidorov
  • M. A. Trishenkov
  • A. M. Filachev
Article

DOI: 10.3103/S1060992X09040109

Cite this article as:
Buzynin, A.N., Grishina, T.N., Kiselyov, T.V. et al. Opt. Mem. Neural Networks (2009) 18: 312. doi:10.3103/S1060992X09040109

Abstract

Prospects of application of zirconia- and hafhia-based solid solutions for development of new generation of photodetectors are considered. The directions of photoelectronics, in which these materials successfully can become alternative to conventional dielectrics, are defined. A number of technologies of deposition and etching of zirconium dioxide and fianite layers were approbated and optimum ones were chosen. Photosensitive structures with fianite and ZrO2 layers were produced.

Key words

zirconium dioxide fianite optoelectronics protective oxide antireflecting coating epitaxy semiconductor on insulator 

Copyright information

© Allerton Press, Inc. 2009

Authors and Affiliations

  • A. N. Buzynin
    • 1
  • T. N. Grishina
    • 2
  • T. V. Kiselyov
    • 2
  • L. A. Kosuhina
    • 2
  • N. V. Kravchenko
    • 2
  • E. E. Lomonova
    • 1
  • V. A. Panov
    • 1
  • M. S. Sidorov
    • 2
  • M. A. Trishenkov
    • 2
  • A. M. Filachev
    • 2
  1. 1.General Physics Institute Russian Academy of SciencesMoscowRussia
  2. 2.Federal State Unitary Enterprise “Research and Production Association ORION,”MoscowRussia

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