Regular Article Clusters and Nanostructures

The European Physical Journal D

, Volume 65, Issue 3, pp 421-428

First online:

Ordering of SiOxHyCz islands deposited by atmospheric pressure microwave plasma torch on Si(100) substrates patterned by nanoindentation

  • X. LandreauAffiliated withSPCTS, ENSIL Email author 
  • , B. LanfantAffiliated withSPCTS, ENSIL
  • , T. MerleAffiliated withSPCTS, CEC
  • , E. LabordeAffiliated withSPCTS, CEC
  • , C. Dublanche-TixierAffiliated withSPCTS, ENSIL
  • , P. TristantAffiliated withSPCTS, ENSIL

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SiO x H y C z nanometric layers are deposited from hexamethyldisiloxane by atmospheric pressure microwave plasma torch on Si(100) substrates submitted to temperatures varying on the range [0 °C; 120 °C]. Atomic force microscopy (AFM) characterizations of samples grown at intermediate substrate temperatures (~30 °C) demonstrate a layer-by-layer growth (Frank van der Merwe growth) leading to smooth flat and compact films while films deposited at lower and higher substrates temperatures show an island-like growth (Volmer-Weber growth) generating a high surface roughness. Concomitantly, a detailed infrared spectroscopy analysis of the growing films evidences structural modifications due to changes in the bond types, Si-O-Si conformation and stoichiometry correlated with scanning electron microscopy and AFM characterizations. Then, deposition conditions and specific microstructure are selected with the aim of generating 3-dimensional SiO x H y C z nanostructure arrays on nanoindented Si (100) templates. The first results are discussed.