Topical issue: 23rd Symposium on Plasma Physics and Technology

The European Physical Journal D

, Volume 54, Issue 2, pp 211-217

First online:

Carbon-free SiOx films deposited from octamethylcyclotetrasiloxane (OMCTS) by an atmospheric pressure plasma jet (APPJ)

  • J. SchäferAffiliated withINP Greifswald Email author 
  • , R. FoestAffiliated withINP Greifswald
  • , A. QuadeAffiliated withINP Greifswald
  • , A. OhlAffiliated withINP Greifswald
  • , J. MeichsnerAffiliated withErnst-Moritz-Arndt University Greifswald
  • , K. D. WeltmannAffiliated withINP Greifswald

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The deposition of carbon-free, silicon oxide (SiOx) films with a non-thermal, RF capillary jet at 27.12 MHz at normal pressure is demonstrated. The gas mixture for film deposition is constituted of argon, oxygen and small admixtures of octamethylcyclotetrasiloxane (Si4O4C8H24, 0.4 ppm). Surface analysis of the deposited films reveals their exceptionally low carbon content. The XPS atom percentage stays at 2% and less, which is near detection limit. The parametric study reported here focuses on the optimization of the deposition process with regard to the chemical and morphological surface properties of the coating by varying oxygen feed gas concentration (0–0.2%) and substrate temperature (10–50 °C).


52.40.Hf Plasma-material interactions; boundary layer effects 52.77.Dq Plasma-based ion implantation and deposition