Abstract
The article focuses on improving the mechanical performance of MEMS gyros exposed to constant accelerations, linear and angular vibrations, and shocks. New designs of MEMS gyros are covered, and development trends are analyzed. The use of elastic systems with several inertial bodies, being an important trend in MEMS gyro technology, is discussed.
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Published in Russian in Giroskopiya i Navigatsiya, 2013, No. 1, pp. 119–133.
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Evstifeev, M.I., Chelpanov, I.B. Improving mechanical performance of mems gyros. Gyroscopy Navig. 4, 174–180 (2013). https://doi.org/10.1134/S2075108713030048
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DOI: https://doi.org/10.1134/S2075108713030048