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Oxidation of hydrocarbon films and metal materials in oxygen-containing low temperature plasma

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Abstract

Glow discharge in oxygen-containing gases (air, a mixture of O2/N2, N2O) was used for selective removal of amorphous hydrocarbon (a-C:H) films predeposited on stainless steel, W, and Mo. The gasification rate of films was maximal in N2O. H2, H2O, CO, and CO2 were plasmolysis products. Thin (3–30 nm) oxide layers, the thicknesses of which depended on the location of samples relative to plasma, formed on the metal after removal of the film.

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Authors and Affiliations

  1. Frumkin Institute of Physical Chemistry and Electrochemistry, Moscow, Russia

    A. E. Gorodetskiy, R. K. Zalavutdinov, V. L. Bukhovets & A. P. Zakharov

Authors
  1. A. E. Gorodetskiy
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  2. R. K. Zalavutdinov
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  3. V. L. Bukhovets
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  4. A. P. Zakharov
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Corresponding author

Correspondence to A. E. Gorodetskiy.

Additional information

Original Russian Text © A.E. Gorodetskiy, R.K. Zalavutdinov, V.L. Bukhovets, A.P. Zakharov, published in Korroziya: Materialy, Zashchita, 2011, No. 12, pp. 38–43.

This work was carried out under the Basic Research Program of OKhNM “New Approaches to Corrosion and Radiation Resistance and Radioecological Safety (2011).

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Gorodetskiy, A.E., Zalavutdinov, R.K., Bukhovets, V.L. et al. Oxidation of hydrocarbon films and metal materials in oxygen-containing low temperature plasma. Prot Met Phys Chem Surf 48, 790–795 (2012). https://doi.org/10.1134/S2070205112070052

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  • DOI: https://doi.org/10.1134/S2070205112070052

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