Abstract
The results of the finite element modeling of oscillations of porous anodic aluminum oxide (AAO) microcantilevers (MCs) are shown. The influence of porosity on the elastic moduli of AAO is studied using the investigated model. Analytical dependences of the influence of porosity on the elastic moduli are obtained. It is shown that this effect can be assumed to be approximately proportional to the square of the volume of the space between the pores.
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Original Russian Text © V.N. Simonov, N.L. Matison, O.V. Boitsova, O.K. Krasil’nikova, 2015, published in Rossiiskie Nanotekhnologii, 2015, Vol. 10, Nos. 5–6.
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Simonov, V.N., Matison, N.L., Boitsova, O.V. et al. Computer simulation of nanoporous alumina microcantilevers and the study of the influence of porosity on the elastic moduli of oxide. Nanotechnol Russia 10, 428–433 (2015). https://doi.org/10.1134/S1995078015030167
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DOI: https://doi.org/10.1134/S1995078015030167