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CVD growth of carbon nanotubes on thin-film Ni20Ti35N45 alloy catalyst

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Abstract

The possibility of forming carbon nanotube (CNT) arrays on a Ni–Ti–N catalytic alloy with low nickel content by chemical vapor deposition (CVD) is demonstrated. Adding nitrogen to the Ni–Ti alloy composition favors the formation of TiN compound and segregation of Ni on the surface, where it produces a catalytic effect on the CNT growth. It is found that, using CVD from acetylene gas phase at a substrate temperature of 650°C, a CNT array of 9-µm height can be grown for 2 min.

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Correspondence to A. S. Shulyat’ev.

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Original Russian Text © D.G. Gromov, A.A. Pavlov, S.N. Skorik, A.Yu. Trifonov, A.S. Shulyat’ev, 2015, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 41, No. 24, pp. 37–43.

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Gromov, D.G., Pavlov, A.A., Skorik, S.N. et al. CVD growth of carbon nanotubes on thin-film Ni20Ti35N45 alloy catalyst. Tech. Phys. Lett. 41, 1177–1180 (2015). https://doi.org/10.1134/S1063785015120226

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  • DOI: https://doi.org/10.1134/S1063785015120226

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