Abstract
The formation of wave nanorelief at surface erosion by ion bombardment is investigated within the Bradley-Harper model. It is shown that such a relief can result from ion bombardment when the stability of a plane profile is lost due to the smallness of the diffusivity or the large fluence. When a number of conditions are met, the family of spatially inhomogeneous solutions describing the dissipative structures of the type of periodically traveling waves bifurcates from the equilibrium state. For this problem, the conditions of existence of the dissipative structures are obtained that correspond to the micro- and nanoripples observed experimentally.
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Original Russian Text © A.V. Metlitskaya, A.N. Kulikov, A.S. Rudy, 2013, published in Mikroelektronika, 2013, Vol. 42, No. 4, pp. 298–305.
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Metlitskaya, A.V., Kulikov, A.N. & Rudy, A.S. Formation of the wave nanorelief at surface erosion by ion bombardment within the Bradley-Harper model. Russ Microelectron 42, 238–245 (2013). https://doi.org/10.1134/S1063739713030050
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DOI: https://doi.org/10.1134/S1063739713030050