Abstract
The effects of changes in the color of silicon plates with nanostructured surfaces versus the features of nanostructures are investigated. Vertical nanostructures with high aspect ratios are constructed via anisotropic two-stage plasma-assisted etching (Bosch process). The surface coloration is explained by the fact that incident radiation is partly trapped by waveguide edge modes and its remaining part is scattered at the surface. The surface-film color is related to the positive and negative curvature of the nanostructures formed as a result of the plasma-assisted process.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
C. V. Tikhov, I. A. Karpovich, and V. G. Testov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 7, 27 (2013).
T. V. Panova and V. S. Kovivchak, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 6, 241 (2012).
T. E. Sukhanova, P. G. Ul’yanov, G. G. Vladimirov, S. I. Fedoseenko, V. K. Adamchuk, S. V. Valueva, A. Ya. Volkov, N. A. Matveeva, and L. N. Borovikova, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 5, 440 (2011).
S. Bozhevolnyi, Plasmonics. Nanoguides and Circuits (Pan Stanford, Singapore, 2009).
S. A. Maier, Plasmonics: Fundamental and Application (Springer, New York, 2007).
K. W. Seo, M. Wober, and P. Steinvurze, Nano Lett. 11, 1851 (2011).
S. S. Walavalkar, A. P. Homyk, and C. E. Hofmann, Appl. Phys. Lett. 98, 153114 (2011).
L. Dobrzynsky and A. A. Maradudin, Phys. Rev. B 6, 3810 (1972).
A. Equiluz and A. A. Maradudin, Phys. Rev. B 14, 5526 (1976).
L. C. Davis, Phys. Rev. B 14, 5523 (1976).
A. D. Boardman, G. C. Aers, and R. Teshima, Phys. Rev. B 24, 5703 (1981).
D. E. Chang, A. S. Sorensen, and P. R. Hemmer, Phys. Rev. B 76, 035420 (2007).
F. Laermer and A. Schilp, US Patent No. 5501893 (1996).
F. Laermer and A. Schilp, US Patent No. 6531068 B2 (2003).
A. S. Davydov, Theory of Solid State (Nauka, Moscow, 1976) [in Russian].
A. N. Tikhonov and A. A. Samarskii, Equations of Mathematical Physics (Nauka, Moscow, 1977) [in Russian].
G. N. Watson, A Treatise on the Theory of Bessel Functions (Cambridge Univ., Cambridge, 1944; Inostr. Liter., Moscow, 1949), p. 798.
V. Abramowitz and I. A. Stegun, Handbook of Mathematical Functions, Nat. Bur. Stds. Appl. Math. Ser., Vol. 55 (U.S. GPO, Washngton, D.C., 1972), p. 686.
P. Longe and S. M. Bose, Phys. Rev. B 48, 18239 (1993).
O. Sato, Y. Tanaka, and M. Kobayashi, Phys. Rev. B 48, 1947 (1993).
V. A. Koval’skii, Extended Abstract of Candidate’s Dissertation in Physics and Mathematics (Inst. Solid State Phys. RAS, Chernogolovka, 2007).
A. V. Pogorelov, Differential Geometry (Nauka, Moscow, 1974) [in Russian].
L. Novotny and B. Hecht, Principles of Nano-Optics (Cambridge Univ. Press, Cambridge, 2006; Fizmatlit, Moscow, 2011).
P. K. Kashkarov and V. Yu. Timoshenko, Optics of Solid State and Systems of Reduced Dimensions (Pul’s, Moscow, 2008) [in Russian].
V. M. Grabov and N. P. Stepanov, Semiconductors 35, 149 (2001).
L. A. Golovan’, V. Yu. Timoshenko, and P. K. Kashkarov, Phys. Usp. 50, 595 (2007).
S. Zhou, N. Janel, and G. C. J. Schatz, Chem. Phys. 120, 10871 (2004).
I. I. Amirov, E. N. Zhikharev, and V. A. Kalnov, in Proceedings of the International Conference on Modern Problems in Physics of Surfaces and Nanostructures (YB IPT RAS, Yaroslavl, Russia, 2010), p. O3–4.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.A. Zalutskaya, A.V. Prokaznikov, 2014, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2014, No. 6, pp. 86–92.
Rights and permissions
About this article
Cite this article
Zalutskaya, A.A., Prokaznikov, A.V. Different coloration of the nanostructured silicon surface upon plasma-assisted etching. J. Surf. Investig. 8, 595–601 (2014). https://doi.org/10.1134/S1027451014030367
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1027451014030367