Skip to main content
SpringerLink
Log in

Small-size systems for separation of primary ion beams in microprobe equipment

  • Brief Communications
  • Published:
Technical Physics Aims and scope Submit manuscript

Abstract

The ion-optical properties and other characteristics of various versions of a double-focusing mass separator are studied. In these designs, the ion transit path is shortened by appropriately selecting the geometry of the ion-optical system. The resolving power of the separating systems is determined with allowance for second-order aberrations.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. V. T. Cherepin, Ion Probe (Naukova Dumka, Kiev, 1981).

    Google Scholar 

  2. H. Liebl, Nucl. Instrum. Methods Phys. Res. A 258, 323 (1987).

    Article  ADS  Google Scholar 

  3. T. Matsuo, T. Sakorai, and M. Ishihara, Nucl. Instrum. Methods Phys. Res. A 298, 134 (1990).

    Article  ADS  Google Scholar 

  4. H. Matsuda, Nucl. Instrum. Methods Phys. Res. A 298, 199 (1990).

    Article  ADS  Google Scholar 

  5. A. S. Kuzema, O. R. Savin, and I. Ya. Chertkov, Zh. Tekh. Fiz. 52, 1182 (1982) [Sov. Phys. Tech. Phys. 27, 715 (1982)].

    Google Scholar 

  6. A. S. Kuzema, O. R. Savin, and I. Ya. Chertkov, Analizers for Magnetic Mass Spectrometers (Naukova Dumka, Kiev, 1987).

    Google Scholar 

  7. S. Penner, Rev. Sci. Instrum. 32, 150 (1961).

    Google Scholar 

  8. A. Kalinichenko, V. Khomenko, S. Lebed, et al., Nucl. Instrum. Methods Phys. Res. B 122, 274 (1997).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Applied Physics, National Academy of Sciences of Ukraine, ul. Petropavlovskaya 58, Sumy, 40030, Ukraine

    S. A. Kuzema & S. N. Mordik

Authors
  1. S. A. Kuzema
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. N. Mordik
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

__________

Translated from Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 71, No. 11, 2001, pp. 124–126.

Original Russian Text Copyright © 2001 by Kuzema, Mordik.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kuzema, S.A., Mordik, S.N. Small-size systems for separation of primary ion beams in microprobe equipment. Tech. Phys. 46, 1470–1472 (2001). https://doi.org/10.1134/1.1418516

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1134/1.1418516

Keywords

Search

Navigation