Abstract
Multicomponent nanostructured (Ti-Zr-Hf-V-Nb)N coatings produced by the cathodic-arc-vapor-deposition method have been studied using several complementary methods of elemental and structural analysis, such as those based on the use of slow positron beam (SPB); proton microbeam (μ-PIXE); electron micro- and nanobeam (EDS and SEM analysis); and X-ray diffraction phase analysis (XRD), including the a-sin2ϕ method of measuring the stress-strain state (X-ray tensometry). The elemental composition, microstructure, residual stresses in nanograins, and in-depth and surface distributions of defects and atoms, as well as the phase composition, stress-strain state, and texture of the coatings have been studied in a 3D representation. It has been found that creating a state of elastic stress-strain compression in the coating can significantly enhance its resistance to oxidation upon annealing. A redistribution of elements and defects (their aligning and segregation) due to diffusion and termination of spinodal segregation has been revealed near interfaces, around grains and subgrains, which occurred without a significant change in the average size of nanograins.
Similar content being viewed by others
References
A. D. Pogrebnyak, A. P. Shpak, N. A. Azarenkov, and V. M. Beresnev, “Structures and properties of hard and superhard nanocomposite coatings,” Phys. Usp. 52, 29–54 (2009).
A. D. Pogrebnyak, A. G. Ponomarev, A. P. Shpak, and Yu. A. Kunitskii, “Application of micro- and nano- probes to the analysis of small-sized 3D materials, nanosystems, and nanoobjects,” Phys. Usp. 55, 270–300 (2012).
A. D. Pogrebnyak, V. M. Beresnev, A. A. Dem’yanenko, V. S. Baidak, F. F. Komarov, M. V. Kaverin, N. Makhmudov, and D. A. Kolesnikov, “Adhesive strength, superhardness, and the phase and elemental compositions of nanostructured coatings based on Ti-Hf-Si-N,” Phys. Solid State 54, 1882–1890 (2012).
A. D. Pogrebnyak, O. V. Sobol’, V. M. Beresnev, P. V. Turbin, S. N. Dub, G. V. Kirik, and A. E. Dmitrenko, “Features of the structural state and mechanical properties of ZrN and Zr(Ti)-Si-N coatings obtained by ion-plasma deposition technique,” Tech. Phys. Lett. 35, 925–928 (2009).
V. Dolique, A.-L. Thomann, P. Brault, Y. Tessier, and P. Gillon, “Complex structure/composition relationship in thin films of AlCoCrCuFeNi high entropy alloy,” Mater. Chem. Phys. 117, 142–147 (2009).
M. Tsai, C. Wang, C. Tsai, W. Shen, J. Yeh, J. Gan, and W. Wu, “Thermal stability and performance of NbSiTaTiZr high-entropy alloy barrier for copper metallization,” J. Electrochem. Soc. 158, H1161–H1165 (2011).
A. Li and X. Zhang, “Thermodynamic analysis of the simple microstructure of AlCrFeNiCu high-entropy alloy with multi-principal elements,” Acta Metall. Sin. (English Letters) 22, 219–224 (2009).
S. A. Firstov, V. F. Gorban’, N. A. Krapivka, and E. P. Pechkovskii, “Strengthening and mechanical properties of cast high-entropy alloys,” Kompoz. Nanostrukt. No. 2, 5–20 (2011).
A. D. Pogrebnjak, V. V. Uglov, M. V. Il’yashenko, V. M. Beresnev, A. P. Shpak, M. V. Kaverin, N. K. Erdybaeva, Yu. A. Kunitskyi, Yu. N. Tyurin, O. V. Kolisnichenko, N. A. Makhmudov, and A. P. Shypylenko, “Nano-microcomposite and combined coatings on Ti-Si-NAA/C-Co-Cr/Steel and Ti-Si-N/(Cr3C2)75-(NiCr)25Base: Their structure and properties,” Ceram. Eng. Sci. Proc. 31(7), 115–126 (2010).
O. V. Sobol’, A. D. Pogrebnyak, and V. M. Beresnev, “Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-arc Zr-Ti-Si-N coatings,” Phys. Met. Metallogr. 112, 188–195 (2011).
J. Musil, J. Vlcek, and P. Zeman, “Hard amorphous nanocomposite coatings with oxidation resistance above 1000°C,” Adv. Appl. Ceram. 107, 148–154 (2008).
A. D. Korotaev, V. D. Borisov, V. Yu. Moshkov, C. V. Ovchinnikov, Yu. P. Pinzhin, and A. N. Tyumentsev, “Elastic stress state in superhard multielement coatings,” Phys. Mesomech. 12, 269–279 (2009).
A. D. Korotaev, D. P. Borisov, D. Yu. Moshkov, S. V. Ovchinnikov, K. V. Oskomov, Yu. P. Pinzhin, V. M. Savostikov, and A. N. Tyumentsev, “Nanocomposite and nanostructured superhard Ti-Si-B-N coatings,” Russ. Phys. J. 50, 969–979 (2007).
O. V. Sobol’, A. A. Andreev, V. F. Gorban’, N. A. Krapivka, V. A. Stolbovoi, I. V. Serdyuk, and V. E. Fil’chikov, “Reproducibility of the single-phase structural state of the multielement high-entropy Ti-V-Zr-Nb-Hf system and related superhard nitrides formed by the vacuum-arc method, Tech. Phys. Lett. 38, 616–619 (2012).
I. V. Blinkov, A. O. Volkhonskii, V. N. Anikin, M. I. Petrzhik, and D. E. Derevtsova, “Phase composition and properties of wear resistant Ti-Al-Cr-Zr-Nb-N coatings manufactured by the arc-physical deposition method,” Inorg. Mater.: Appl. Res. 2, 285–291 (2011).
Lin, Shao-Yi, Chang, Shou-Yi, Huang, Yi-Chung, Shieu, Fuh-Sheng, and Yeh., Jien-Wei, “Mechanical performance and nanoindenting deformation of (AlCrTa-TiZr)NCy multi-component coatings co-sputtered with bias,” Surf. Coat. Technol. 206, 5096–5102 (2012).
J. Musil, “Hard nanocomposite coatings: Thermal stability and toughness,” Surf. Coat. Technol. 207, 50–65 (2012).
A. D. Pogrebnjak and V. M. Beresnev, Nanocoatings Nanosystems Nanotechnologies (Bentham e Books, 2012).
A. D. Pogrebnjak, A. P. Shpak, V. M. Beresnev, D. A. Kolesnikov, Yu. A. Kunitsky, O. V. Sobol, V. V. Uglov, F. F. Komarov, A. P. Shypylenko, A. A. Demyanenko, V. S. Baidak, and V. V. Grudnitskii, J. Nanosci. Nanotechnol. 12, 9213–9219 (2012).
Chang, Hui-Wen, Huang, Ping-Kang, Yeh, Jien-Wei, A. Davison, Tsau, Chun-Huai, and Yang, Chih-Chao, “Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multiprincipal component (AlCrMoSiTi)N coatings,” Surf. Coat. Technol. 202, 3360–3366 (2008).
Lai, Chia-Han, Cheng, Keng-Hao, Lin, Su-Jein, and Yeh, Jein-Wei, “Mechanical and tribological properties of multi-element (AlCrTaTiZr)N coatings,” Surf. Coat. Technol. 202, 3732–3738 (2008).
Lai, Chia-Han, Tsai, Ming-Hung, Lin, Su-Jien, and Yeh, Jein-Wei, “Influence of substrate temperature on structure and mechanical properties of multi-element (AlCrTaTiZr)N coatings,” Surf. Coat. Technol. 201, 6993–6998 (2007).
Yeh, Jein-Wei, Chen, Yu-Liang, Lin, Su-Jein, and Chen, Swe-Kai, “High-entropy alloys-A new era of exploitation,” Mater. Sci. Forum 560, 1–9 (2007).
N. A. Azarenkov, O. V. Sobol’, A. D. Pogrebnyak, and V. M. Beresnev, Engineering of Vacuum-Plasma Coatings (Khark. Nat. Univ., Kharkov, 2011) [in Russian].
H.-E. Shaefer, “Investigation of thermal equilibrium vacancies in metals by positron annihilation,” Phys. Status Solidi A, 102, 47–65 (1987).
S. V. Rempel’ and A. I. Gusev, “Surface segregation in decomposing carbide solid solutions,” JETP Lett. 88, 435–440 (2008).
R. Wurschum, P. Farber, R. Dittmar, P. Scharwaechter, W. Frank, and H.-E. Schaefer, “Thermal vacancy formation and self-diffusion in intermetallic Fe3Si nanocrystallites of nanocomposite alloys,” Phys. Rev. Lett. 79, 4918–4921 (1997).
V. I. Lavrent’ev, A. D. Pogrebnyak, and R. Shandrik, “Local surface segregations of implanted aluminum in weak-defected iron crystal,” Pis’ma Zh. Eksp. Teor. Fiz. 65, 86–89 (1997).
S. Veprek and M. G. J. Veprek-Heijman, “Limits to the preparation of superhard nanocomposites: Impurities, deposition and annealing temperature,” Thin Solid Films 522, 274–282 (2012).
J. Musil, “Hard and superhard nanocomposite coatings,” Surf. Coat. Technol. 125, 322–330 (2000).
A. I. Gusev, Nanomaterials, Nanostructures, Nanotechnologies (FIZMATLIT, Moscow, 2005) [in Russian].
R. Krause-Rehberg and H. S. Leipner, Positron Annihilation in Semiconductors Defect Studies (Springer-Verlag, Berlin, 1999).
A. D. Pogrebnyak, A. G. Ponomarev, D. A. Kolesnikov, V. M. Beresnev, F. F. Komarov, S. S. Mel’nik, and M. V. Kaverin, “Effect of mass transfer and segregation on the formation of superhard nanostructured Ti-Hf-N(Fe) coatings,” Tech. Phys. Lett. 38, 623–626 (2012).
P. Misaelides, A. Hadzidimitrion, F. Noli, E. Pavlidou, and A. D. Pogrebnjak, “Investigation of the characteristics and corrosion resistance of Al2O3/TiN coatings,” Appl. Surf. Sci. 252, 8043–8049 (2006).
A. D. Pogrebnjak, O. V. Sobol, V. M. Beresnev, P. V. Turbin, G. V. Kirik, N. A. Makhmudov, M. V. Il’yashenko, A. P. Shypylenko, M. V. Kaverin, M. Yu. Tashmetov, A. V. Pshyk, “Phase Composition, Thermal Stability, Physical and Mechanical Properties of Superhard on Based Zr-Ti-Si-N Nanocomposite coatings,” Sci. Proc. Wiley 31(7), 127–138 (2010).
A. D. Pogrebnjak, Sh. M. Ruzimov, D. L. Alontseva, P. Zukowski, K. Karwat, C. Kozak, M. Kolasik, “Structure and properties of coatings on Ni base deposited using a plasma jet before and after electron a beam irradiation,” Vacuum. 81(10), 1243–1251 (2007).
A. D. Pogrebnjak, O. G. Bakharev, N. A. Pogrebnjak, Jr., Yu. V. Tsvintarnaya, V. T. Shablja, R. Sandrik, A. Zecca, “Certain features of High-dose and Intensive Implantation of Al ions in Iron,” Phys. Letters A. 265(3), 225–232 (2000).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © R. Krause-Rehberg, A.D. Pogrebnyak, V.N. Borisyuk, M.V. Kaverin, A.G. Ponomarev, M.A. Bilokur, K. Oyoshi, Y. Takeda, V.M. Beresnev, O.V. Sobol’, 2013, published in Fizika Metallov i Metallovedenie, 2013, Vol. 114, No. 8, pp. 731–740.
Rights and permissions
About this article
Cite this article
Krause-Rehberg, R., Pogrebnyak, A.D., Borisyuk, V.N. et al. Analysis of local regions near interfaces in nanostructured multicomponent (Ti-Zr-Hf-V-Nb)N coatings produced by the cathodic-arc-vapor-deposition from an arc of an evaporating cathode. Phys. Metals Metallogr. 114, 672–680 (2013). https://doi.org/10.1134/S0031918X13080061
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0031918X13080061