Skip to main content
SpringerLink
Log in

Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-Arc Zr-Ti-Si-N coatings

  • Strength and Plasticity
  • Published:
The Physics of Metals and Metallography Aims and scope Submit manuscript

Abstract

Regularities of the formation of the phase and structural state and mechanical characteristics of vacuum-arc coatings produced by the evaporation of Zr-Ti-Si-N targets in a reactive nitrogen atmosphere have been studied. For the targets of compositions Zr 92.0 wt %, Ti 3.9 wt %, Si 4.1 wt %, and Zr 64.2 wt %, Ti 32.1 wt %, Si 3.7 % at a working pressure of the nitrogen atmosphere of 0.1-0.8 Pa and a potential at the substrate of −100 and −200 V, the formation of a single-phase crystalline state of the coatings (nitride of the solid solution of the components of the target) has been established. The size of crystallites is in the nanometer range (25–85 nm). An increase in the size of crystallites in the direction of the incidence of the film-forming particles (perpendicular to the growth plane) is favored by an increase in the bias potential from −100 to −200 V. The low heat conductivity of the metallic (Ti and Zr) components of the target leads to a significant content of a droplet phase when using the direct-flow regime of the vacuum-arc deposition and requires the employment of a technological scheme with a separation of the film-forming beams to increase the homogeneity of the high mechanical properties of the coatings. The use of film-forming beams separated from the droplet phase makes it possible to increase the homogeneity of the surface morphology of the coatings with the retention of a large index of plasticity (H/E = 0.8–0.9) and high hardness (33–37 GPa) of the material of the coating.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. O. Knotek, T. Leyendeker, and F. Jungblut, “On the Properties of Physically Vapour-Deposited Ti-Al-V-N Coatings,” Thin Solid Films 153, 83–90 (1987).

    Article  CAS  Google Scholar 

  2. F. Kauffmann, G. Dehm, V. Schier, A. Schattke, T. Beck, S. Lang, and E. Arzt, “Microstructural Size Effects on the Hardness of Nanocrystalline TiN/Amorphous-SiNx Coatings Prepared by Magnetron Sputtering,” Thin Solid Films 473, 114–122 (2005).

    Article  CAS  Google Scholar 

  3. H. Soderberg, M. Oden, J. M. Molina-Aldareguia, and L. Hultman, “Nanostructure Formation during Deposition of TiN/SiNx Nanomultilayer Films by Reactive Dual Magnetron Sputtering,” J. Appl. Phys. 97, 114327 (2005).

    Article  Google Scholar 

  4. I. Grimberg, V. N. Zhitomirky, R. L. Boxman, and S. Goldsmith, “Multicomponent Ti-Zr-N and Ti-Nb-N Coatings Deposited by Vacuum Arc,” Surf. Coat. Tech. 108–109, 154–159 (1998).

    Article  Google Scholar 

  5. O. Knotek, W. D. Munz, and T. Leyendeker, “Industrial Deposition of Binary, Ternary and Quaternary Nitrides of Titanium, Zirconium and Aluminium,” J. Vac. Sci. Technol. A 5(4), 2173–2179 (1987).

    Article  CAS  Google Scholar 

  6. D. Y. Wang, C. L. Cang, C. H. Hsu, and H. N. Lin, “Synthesis of (Ti, Zr)N Hard Coatings by Unbalanced Magnetron Sputtering,” Surf. Coat. Technol. 130, 64–68 (2000).

    Article  CAS  Google Scholar 

  7. A. P. Shpak, A. I. Nakonechnaya, Yu. A. Kunitskii, and O. V. Sobol’, Mechanical Properties of Titanium-Based Coatings (PTs IMF NANU, Kiev, 2005) [in Russian].

    Google Scholar 

  8. I. I. Aksenov, Vacuum Arc in Erosion Plasma Sources (NNTs KhFTI, Kharkov, 2005) [in Russian].

    Google Scholar 

  9. L. S. Palatnik, M. Ya. Fuks, and V. M. Kosevich, Mechanism of Formation and the Substructure of Condensed Films (Nauka, Moscow, 1972) [in Russian].

    Google Scholar 

  10. O. V. Sobol, E. A. Sobol, L. I. Gladkikh, and A. N. Gladkikh, “On the Mechanism of β-WC-α-W2C Transformation under Annealing in Magnetron-Sputtering Tungsten Carbide Films,” Funct. Mater. 9(3), 486–490 (2002).

    CAS  Google Scholar 

  11. O. V. Sobol’, A. D. Pogrebnyak, P. V. Turbin, et al., “Structure and Properties of Nanocrystalline Coatings in Zr-Ti-Si-N System Obtained by Vacuum Arc Evaporation with High-Frequency Stimulation,” Visn. Kharkov. Nat. Univ., Ser. Fiz., No. 914, 48–53 (2010).

  12. O. V. Sobol’, “Phase Composition, Structure, and Stressed State of Tungsten Films Produced by Ion-Plasma Sputtering,” Fiz. Met. Metalloved. 91(1), 63–71 (2001) [Phys. Met. Metallogr. 91 (1), 60–68 (2001)].

    Google Scholar 

  13. L. I. Mirkin, X-ray Diffraction Control of Engineering Materials: A Handbook (Mashinostroenie, Moscow, 1979) [in Russian].

    Google Scholar 

  14. C. Y. Ho, R. W. Powel, and P. E. Liley, “Thermal Conductivity of the Elements,” J. Phys. Chem. Ref. Data 1(2), 279–425 (1972).

    Article  CAS  Google Scholar 

  15. A. P. Shpak, O. V. Sobol’, V. A. Tatarenko, Yu. A. Kunitskii, M. Yu. Barabash, D. S. Leonov, and V. A. Dement’ev, “Regularities of the Formation of Nonequilibrium Structure of Ion-Plasma Condensates of Quasi-Binary Carbide and Boride Systems,” Metallofiz. Noveishie Tekhnol. 30(4), 525–535 (2008).

    CAS  Google Scholar 

  16. O. V. Sobol’, “Mechanism of Formation of the Phase and Structural State of Condensates Produced by Ion Sputtering,” Fiz. Inzhener. Poverkhn. 6(1-2), 20–36 (2008).

    Google Scholar 

  17. A. D. Pogrebnjak, O. V. Sobol, V. M. Beresnev, P. V. Turbin, G. V. Kirik, N. A. Makhmudov, M. V. Il’yashenko, A. P. Shypylenko, M. V. Kaverin, M. Yu. Tashmetov, and A. V. Pshyk, “Phase Composition, Thermal Stability, Physical and Mechanical Properties of Superhard on Base Zr-Ti-Si-N Nanocomposite Coatings,” in Nanostructured Materials and Nanotechnologies IV: Ceramic Engineering and Science Proceedings 31(7), 127–138 (2010).

    Article  CAS  Google Scholar 

  18. O. V. Sobol’, E. A. Sobol’, and A. A. Podtelezhnikov, “Peculiarities of Texture Formation in Coatings Obtained from Ion-Plasma Beams,” Funct. Mater. 6(5), p. 868–876 (1999).

    Google Scholar 

  19. A. D. Pogrebnyak, A. P. Shpak, N. A. Azarenkov, and V. M. Beresnev, “Structures and Properties of Hard and Superhard Nanocomposite Coatings,” Usp. Fiz. Nauk 179(1), 34–63 (2009) [Phys.-Usp. 52 (1), 29–54 (2009)].

    Article  Google Scholar 

  20. V. M. Beresnev, O. V. Sobol’, A. D. Pogrebnyak, P. V. Turbin, and S. V. Litovchenko, “Thermal Stability of the Phase Composition, Structure, and Stressed State of Ion-Plasma Condensates in the Zr-Ti-Si-N System,” Zh. Tekh. Fiz. 80(6), 117–120 (2010) [Tech. Phys. 55 (6), 871–873 (2010)].

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. National Technical University “Kharkov Polytechnical Institute”, ul. Frunze 21, Kharkov, 61002, Ukraine

    O. V. Sobol’

  2. Sumy Institute of Surface Modification, Sumy State University, ul. Rimskogo-Korsarova 2, 40007, Sumy, Ukraina

    A. D. Pogrebnyak

  3. Research Physicotechnological Center, MES and NAS of Ukraine, pl. Svobody 6, 61022, Kharkov, Ukraine

    V. M. Beresnev

Authors
  1. O. V. Sobol’
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. D. Pogrebnyak
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. M. Beresnev
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Original Russian Text © O.V. Sobol’, A.D. Pogrebnyak, V.M. Beresnev, 2011, published in Fizika Metallov i Metallovedenie, 2011, Vol. 112, No. 2, pp. 199–206.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Sobol’, O.V., Pogrebnyak, A.D. & Beresnev, V.M. Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-Arc Zr-Ti-Si-N coatings. Phys. Metals Metallogr. 112, 188–195 (2011). https://doi.org/10.1134/S0031918X11020268

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0031918X11020268

Keywords

Search

Navigation