Fundamental Investigation of Micro Wear Rate Using an Atomic Force Microscope
- Cite this article as:
- Chung, KH. & Kim, DE. Tribology Letters (2003) 15: 135. doi:10.1023/A:1024457132574
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Micro-wear characteristics of Si and Si3N4 tips and the surfaces of Au, Cu, DLC, and bare Si were investigated using an Atomic Force Microscope (AFM). The range of applied load was between 10 to 800 nN. It was found that the wear coefficient values were between 10-3 to 10-1 and 10-5 to 10-4 for Si and Si3N4 tip, respectively. The experimentally obtained wear rates were comparable to those of the macro-scale systems. Also, evidence of micro-plastic deformation could be found on the wear track.