, Volume 24, Issue 3, pp 220-236

The Problem of Subrayleigh Resolution in Interference Microscopy

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A method allowing subwavelength resolution within the framework of optical interferometric microscopy is proposed. It is shown that overcoming the diffraction limit is not a necessary requirement. Generally speaking, “subrayleigh resolution” and “overcoming the diffraction limit” are basically different concepts. The method developed uses the all-parameter modulation of the light source and separation of the phase shifts generated due to different reasons. In this method, a topological phase technique is used to separate the phases and therefore determine the corresponding characteristics of an object. The approach developed provides for a way to create a new type of optical devices. Within the framework of a uniform measuring procedure these devices make possible determining both geometrical and material parameters of the object under study.