The Problem of Subrayleigh Resolution in Interference Microscopy
- Cite this article as:
- Andreev, V.A. & Indukaev, K.V. Journal of Russian Laser Research (2003) 24: 220. doi:10.1023/A:1024099725192
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A method allowing subwavelength resolution within the framework of optical interferometric microscopy is proposed. It is shown that overcoming the diffraction limit is not a necessary requirement. Generally speaking, “subrayleigh resolution” and “overcoming the diffraction limit” are basically different concepts. The method developed uses the all-parameter modulation of the light source and separation of the phase shifts generated due to different reasons. In this method, a topological phase technique is used to separate the phases and therefore determine the corresponding characteristics of an object. The approach developed provides for a way to create a new type of optical devices. Within the framework of a uniform measuring procedure these devices make possible determining both geometrical and material parameters of the object under study.