Optical waveguides on polysilicon-on-insulator

  • A. Säynätjoki
  • J. Riikonen
  • H. Lipsanen
  • J. Ahopelto
Article

DOI: 10.1023/A:1023921305986

Cite this article as:
Säynätjoki, A., Riikonen, J., Lipsanen, H. et al. Journal of Materials Science: Materials in Electronics (2003) 14: 417. doi:10.1023/A:1023921305986

Abstract

Optical waveguide structures have been fabricated on polysilicon-on-insulator. Structural and optical properties of the waveguides are studied by X-ray diffraction, atomic force microscopy, scanning electron microscopy, and transmission measurements. Reasons for the waveguide loss are discussed. It is found that surface roughness can be responsible for a waveguide loss of more than 60 dB cm−1 and that additional loss mechanisms probably exist. Methods of smoothing the surface are discussed.

Copyright information

© Kluwer Academic Publishers 2003

Authors and Affiliations

  • A. Säynätjoki
    • 1
  • J. Riikonen
    • 1
  • H. Lipsanen
    • 1
  • J. Ahopelto
    • 2
  1. 1.Optoelectronics LaboratoryHelsinki University of TechnologyHUTFinland
  2. 2.VTT Centre for MicroelectronicsVTTFinland

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