Optical waveguides on polysilicon-on-insulator
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Optical waveguide structures have been fabricated on polysilicon-on-insulator. Structural and optical properties of the waveguides are studied by X-ray diffraction, atomic force microscopy, scanning electron microscopy, and transmission measurements. Reasons for the waveguide loss are discussed. It is found that surface roughness can be responsible for a waveguide loss of more than 60 dB cm−1 and that additional loss mechanisms probably exist. Methods of smoothing the surface are discussed.
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Journal of Materials Science: Materials in Electronics
Volume 14, Issue 5-7 , pp 417-420
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