Journal of Materials Science

, Volume 32, Issue 16, pp 4269–4273

A novel wet process for the preparation of vanadium dioxide thin film

  • S DEKI
  • Y AOI

DOI: 10.1023/A:1018603402586

Cite this article as:
DEKI, S., AOI, Y. & KAJINAMI, A. Journal of Materials Science (1997) 32: 4269. doi:10.1023/A:1018603402586


Thin films of vanadium oxide have been prepared from an aqueous solution system of (V2O5–HF aq.) with the addition of aluminium metal by a novel wet-preparation process which is called liquid-phase deposition (LPD). From X-ray diffraction measurements, the as-deposited film was found to be amorphous and it was then crystallized to V2O5 by calcination at 400 °C under an air flow. In contrast, the monoclinic VO2 phase was obtained when the deposited film was calcined under a nitrogen atmosphere. The deposited film showed excellent adherence to the substrate and was characterized by a homogeneous flat surface. The deposited VO2 film exhibited a reversible semiconductor–metal phase transition around 70 °C and its transition behaviour depended on the way in which the film was prepared.

Copyright information

© Chapman and Hall 1997

Authors and Affiliations

  • S DEKI
    • 1
  • Y AOI
  1. 1.Department of Chemical Science and Engineering, Faculty of EngineeringKobe UniversityRokkodai-cho, Nada-ku KobeJapan