Biomedical Microdevices

, Volume 3, Issue 4, pp 339–351

Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Polymer-Based Microfabrication

Authors

  • L. James Lee
    • Department of Chemical EngineeringThe Ohio State University
  • Marc J. Madou
    • Department of Materials Science and EngineeringThe Ohio State University
  • Kurt W. Koelling
    • Department of Chemical EngineeringThe Ohio State University
  • Sylvia Daunert
    • Department of ChemistryUniversity of Kentucky
  • Siyi Lai
    • Department of Chemical EngineeringThe Ohio State University
  • Chee Guan Koh
    • Department of Chemical EngineeringThe Ohio State University
  • Yi-Je Juang
    • Department of Chemical EngineeringThe Ohio State University
  • Yumin Lu
    • Department of Materials Science and EngineeringThe Ohio State University
  • Liyong Yu
    • Department of Chemical EngineeringThe Ohio State University
Article

DOI: 10.1023/A:1012469017354

Cite this article as:
Lee, L.J., Madou, M.J., Koelling, K.W. et al. Biomedical Microdevices (2001) 3: 339. doi:10.1023/A:1012469017354

Abstract

Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.

microfabricationCNC-machiningphotolithographyelectroplatingdeep reactive ion etchingliquid resin castingthin wall injection moldinghot embossing

Copyright information

© Kluwer Academic Publishers 2001