Biomedical Microdevices

, Volume 3, Issue 4, pp 339–351

Design and Fabrication of CD-Like Microfluidic Platforms for Diagnostics: Polymer-Based Microfabrication

  • L. James Lee
  • Marc J. Madou
  • Kurt W. Koelling
  • Sylvia Daunert
  • Siyi Lai
  • Chee Guan Koh
  • Yi-Je Juang
  • Yumin Lu
  • Liyong Yu
Article

DOI: 10.1023/A:1012469017354

Cite this article as:
Lee, L.J., Madou, M.J., Koelling, K.W. et al. Biomedical Microdevices (2001) 3: 339. doi:10.1023/A:1012469017354

Abstract

Several microfabrication methods for polymer-based CD microfluidic platforms are presented in this paper. For prototyping, both traditional CNC-machining and photolithography techniques were used. For mass production, mold inserts were made by CNC-machining of tool steel and LIGA-like processes such as UV photolithography, photolithography/electroplating, and photolithography/deep reactive ion etching (DRIE). Several molding methods were tried, including liquid resin casting, thin wall injection molding, and hot embossing. Advantages and disadvantages of each method are explained. Plastic bonding for microfluidic platforms is also briefly discussed.

microfabricationCNC-machiningphotolithographyelectroplatingdeep reactive ion etchingliquid resin castingthin wall injection moldinghot embossing

Copyright information

© Kluwer Academic Publishers 2001

Authors and Affiliations

  • L. James Lee
    • 1
  • Marc J. Madou
    • 2
  • Kurt W. Koelling
    • 1
  • Sylvia Daunert
    • 3
  • Siyi Lai
    • 1
  • Chee Guan Koh
    • 1
  • Yi-Je Juang
    • 1
  • Yumin Lu
    • 2
  • Liyong Yu
    • 1
  1. 1.Department of Chemical EngineeringThe Ohio State UniversityColumbus
  2. 2.Department of Materials Science and EngineeringThe Ohio State UniversityColumbus
  3. 3.Department of ChemistryUniversity of KentuckyUSA