The effect of anodic oxide treatment on n-GaAs Schottky barrier diodes
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- Biber, M., Çakar, M. & Türüt, A. Journal of Materials Science: Materials in Electronics (2001) 12: 575. doi:10.1023/A:1012441619984
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The anodically treated and untreated (control sample) Au/-Cu/n-GaAs Schottky diodes have been prepared. The anodic oxidization process has been made on the n-GaAs substrate in aqueous \( 4C_2 H_6 O_2 + 2H_3 PO_4 \) electrolyte with pH=2.02. The anodic treatment has increased the barrier heights. We have obtained the laterally homogeneous barrier heights of approximately 0.79 and 0.91 eV for the anodically untreated and treated Au/n-GaAs SBDs, respectively, and 0.67 and 0.91 eV for the Cu/n-GaAs SBD eV respectively when accounting for the image-forge effect only. Thus, the barrier height has been increased by at least 110 and 240 meV for Au/n-GaAs and Cu/n-GaAs SBDs, respectively.