Journal of Materials Science: Materials in Electronics

, Volume 11, Issue 5, pp 383–387

Conductive and transparent ZnO:Al thin films obtained by chemical spray

  • M. de la L. Olvera
  • A. Maldonado
  • R. Asomoza
  • R. Castanedo-Pe´rez
  • G. Torres-Delgado
  • J. Can~etas-Ortega
Article

DOI: 10.1023/A:1008990431442

Cite this article as:
Olvera, M.d.L., Maldonado, A., Asomoza, R. et al. Journal of Materials Science: Materials in Electronics (2000) 11: 383. doi:10.1023/A:1008990431442

Abstract

Electrical, structural, morphological and optical characteristics of ZnO:Al thin films obtained by chemical spray are presented in this paper. The dependence of the resistivity on the substrate temperature and the film thickness is reported. For the optimized conditions with no post-annealing the lowest resistivity values obtained for ZnO:Al thin films were \(1.4 \times 10^{ - 2} \Omega {\text{cm}}\) for films with thicknesses of 1500 and 600 nm, respectively. Preferential growth in the (0 0 2) direction was observed in all cases. The surface morphology was analyzed by using atomic force and scanning electron microscopy (AFM and SEM) techniques. High transmittance, 85%, was obtained in all cases. The band gap was of the order of 3.35 eV.

Copyright information

© Kluwer Academic Publishers 2000

Authors and Affiliations

  • M. de la L. Olvera
    • 1
  • A. Maldonado
    • 1
  • R. Asomoza
    • 1
  • R. Castanedo-Pe´rez
    • 2
  • G. Torres-Delgado
    • 2
  • J. Can~etas-Ortega
    • 3
  1. 1.Depto. de Ingenieri´a Ele´ctricaCINVESTAV-IPNMe´xico, D. FMe´xico
  2. 2.Lab. de Investigacio´n en MaterialesCINVESTAV-IPN, Unidad Quere´taroQuere´taro, Qro.Me´xico
  3. 3.Instituto de FisicaUniversidad Nacional Auto´noma de Me´xicoMe´xicoD. F. Me´xico