Absolute lattice parameter measurement

  • P. F. Fewster

DOI: 10.1023/A:1008935709977

Cite this article as:
Fewster, P.F. Journal of Materials Science: Materials in Electronics (1999) 10: 175. doi:10.1023/A:1008935709977


Absolute lattice parameter methods are useful for determining alloy composition, understanding point defects and dopants in semiconductor substrate materials and for the evaluation of lattice relaxation in heteroepitaxial layers. This paper reviews the techniques available. The assumptions and uncertainties of each technique are discussed.

Copyright information

© Kluwer Academic Publishers 1999

Authors and Affiliations

  • P. F. Fewster
    • 1
  1. 1.Philips Research LaboratoriesRedhillUK

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