Atomic Force Microscopy Study of TiO2 Films Obtained by the Sol-Gel Method
- Cite this article as:
- Zaharescu, M., Crisan, M. & MuŠeviČ, I. Journal of Sol-Gel Science and Technology (1998) 13: 769. doi:10.1023/A:1008673812626
Atomic Force Microscopy (AFM) was used to study the influence of thermal treatments on the structural and textural properties of the sol-gel TiO2 films obtained from Ti(OC3H7i)4. X-ray diffraction (XRD), ellipsometric and porosity measurements have also been made.
The TiO2 sol-gel films were homogeneous, transparent and amorphous. Heat treatments in the 400–600°C range indicate that the films have a strong tendency to crystallization. The high initial homogeneity of the TiO2 films was preserved during the crystallization process. AFM shows that the thermally treated films exhibit uniform, monodispersed crystals.