Journal of Sol-Gel Science and Technology

, Volume 13, Issue 1, pp 509–516

Development of the SC-RTA Process for Fabrication of Sol-Gel Based Silica-on-Silicon Integrated Optic Components

  • R.R.A. Syms
  • A.S. Holmes
  • W. Huang
  • V.M. Schneider
  • M. Green
Article

DOI: 10.1023/A:1008606220011

Cite this article as:
Syms, R., Holmes, A., Huang, W. et al. Journal of Sol-Gel Science and Technology (1998) 13: 509. doi:10.1023/A:1008606220011

Abstract

The SC-RTA process for fabricating silica-on-silicon PLCs from sol-gel glass is described. A wide range of glasses has been deposited, process temperatures have been reduced, and components fabricated by reactive ion etching, reflow and burial of channel guides have shown steadily decreasing loss. Propagation losses are ≈0.2 dB/cm at λ = 1.523 μm in a high Δn system. Passive components demonstrated include tree-structured power splitters and thermo-optic switches.

sol-gel glasssilica-on-siliconintegrated opticsplanar lightwave circuit

Copyright information

© Kluwer Academic Publishers 1998

Authors and Affiliations

  • R.R.A. Syms
    • 1
  • A.S. Holmes
    • 1
  • W. Huang
    • 1
  • V.M. Schneider
    • 1
  • M. Green
    • 1
  1. 1.Optical and Semiconductor Devices Section, Dept. of Electrical and Electronic EngineeringImperial CollegeLondonUK