Skip to main content
SpringerLink
Log in

A Morphology Study of Magnetron-Sputtered Al Films by Atomic Force Microscopy

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. S. Buchholz, H. Fuchs and J. P. Rabe, J. Vac. Sci. Technol. B9 (1991) 857.

    Google Scholar 

  2. T. Kacsich, M. Neubauer, U. Geyer, K. Baumann, F. Rose and M. Uhrmacher J. Phys. D: Appl. Phys. 28 (1995) 424.

    Google Scholar 

  3. D. Wang, U. Geyer, S. Schneider and G. Von Minnigerode, Thin Solid Films, 292 (1997) 184.

    Google Scholar 

  4. C. Eisenmenger-Sittner, A. Bergauer, H. Bangert and W. Bauer, J. Appl. Phys. 78 (1995) 4899.

    Google Scholar 

  5. S. Yan, Y. De-Quan and C. Jing-Zhong, J. Mater. Sci. submitted.

Download references

Author information

Authors and Affiliations

  1. Laboratory of Applied Surface Physics, Lanzhou Institute of Physics, P.O. Box #94, Lanzhou, 730 000, People's Republic of China

    Sun Yan, Yang De-Quan & Cui Jing-Zhong

Authors
  1. Sun Yan
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Yang De-Quan
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Cui Jing-Zhong
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yan, S., De-Quan, Y. & Jing-Zhong, C. A Morphology Study of Magnetron-Sputtered Al Films by Atomic Force Microscopy. Journal of Materials Science Letters 18, 407–409 (1999). https://doi.org/10.1023/A:1006605406729

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1006605406729

Keywords

Search

Navigation