Abstract
Mechanical failure of integrated circuits and micro-electro-mechanical systems (MEMS) demands new understanding of friction in small devices. In present research, we demonstrated an in situ approach to measure sliding friction of a patterned surface composing multi-materials and structures. The effects of materials and surface morphology on friction and electrical contact resistance were investigated. The material transfer at the interface of dissimilar materials was found to play dominating roles in friction. The current work provides important insights from the fundamentals of friction that benefit the design of new micro-devices.
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This article is published with open access at Springerlink.com
Xiao, Wang, and Fox contributed equally to this work.
Huaping XIAO. Ph. D. candidate at Department of Mechanical Engineering, Texas A&M University (TAMU), USA. He obtained his Bachelor degree in 2006 from Tianjin University and Master’s degree in 2011 from Tsinghua University. Since 2011, he has been at TAMU working with Dr. Liang. His research areas include lubrication properties and wear behaviors under high pressure and bio-related tribological systems.
Hong LIANG. Professor at Texas A&M University, USA. Dr. Liang conducted her postdoc research at National Institute of Technology (NIST) after obtaining her Ph. D. from Stevens Institute of Technology. She is a fellow of American Society of Mechanical Engineers (ASME) and a fellow of Society of Tribologists and Lubrication Engineers (STLE). Dr. Liang has extensive experience in academia, government laboratories, and industry. She has maintained long-standing interests and activity in tribology, surface science, chemical-mechanical planarization, and nanomanufacturing.
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Xiao, H., Wang, K., Fox, G. et al. Spatial evolution of friction of a textured wafer surface. Friction 1, 92–97 (2013). https://doi.org/10.1007/s40544-013-0008-0
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DOI: https://doi.org/10.1007/s40544-013-0008-0