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An analysis of electrostatically actuated micro vibrating structures incorporating squeezed film damping effect using an electrical equivalent circuit

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Abstract

This paper investigates the response of microcantilever and microbridge actuators, under alternating current (AC) and direct current (DC) excitations. The analysis is carried out by simulating the electrical equivalent circuit of the actuators. An analogous circuit model for evaluation of velocity and acceleration in the microstructure is incorporated to the basic circuit model. The influence of squeeze film on the vibrating structure is also investigated. The effect of DC bias voltage on displacement, capacitance and electrostatic force are investigated. The transient response predicts a minimal change due to the pressure variation in the damping medium owing to the geometrical dimensions of the elements in the actuator. The frequency dependence of velocity and acceleration are also evaluated in this study.

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Authors and Affiliations

  1. Department of Electronics Engineering, Madras Institute of Technology, Anna University, Chennai, India

    C. Kavitha & M. Ganesh Madhan

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  1. C. Kavitha
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  2. M. Ganesh Madhan
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Correspondence to C. Kavitha.

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Technical Editor: Aline Souza de Paula.

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Kavitha, C., Ganesh Madhan, M. An analysis of electrostatically actuated micro vibrating structures incorporating squeezed film damping effect using an electrical equivalent circuit. J Braz. Soc. Mech. Sci. Eng. 39, 925–936 (2017). https://doi.org/10.1007/s40430-016-0492-z

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  • DOI: https://doi.org/10.1007/s40430-016-0492-z

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