Abstract
In this paper we report on the characteristics of Schottky contact behavior of AlGaN/GaN High Electron Mobility Transistors (HEMTs) on a Si Substrate. A variety of electrical techniques such as capacitance-voltage (C-V) and deep level transient spectroscopy (DLTS) measurements have been used to characterize the diode. The behavior of the ideality factor n, the effective barrier height Φb, and the series resistance RS is studied with temperature. C-V measurements successively sweeping up and down the voltage from 0 V to 12 V(absolute value) have demonstrated a hysteresis phenomenon which is more pronounced when the temperature increases. This parasitic effect can be attributed to the presence of traps activated in the Schottky diode. The related deep levels defects which are responsible for parasitic effects, were characterized and extracted by the Deep Level Transient Spectroscopy (DLTS) technique that has been used in previous studies. The identification of these traps showed a correlation between DLTS and C-V measurements.
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Kumar V, Kuliev A, Schwindt R, Muir M, Simin G, Yang J, Khan MA, Adesida I (2003) Solid-State Electron 47:1577
Manfra MJ, Weimann N, Baeyens Y, Roux P, Tennant DM (2003) Electron lett 39:694
Morkoç H (2008) Handbook of Nitride Semiconductors and devices, vol I-III. Wiley-VCH, Berlin
Gangwani P, Pandey S, Haldar S, Gupta M, Gupta RS (2007) Solid State Electron 51:130–135
Bradely ST, Young AP, Brillson LJ, Murphy MJ, Schaff MJ, Eastman LF (2001) IEEE Trans Electron Devices 48:412
Gassoumi M, Bluet JM, Guillot G, Gaquière C, Maaref H (2006). Mater Sci Eng C 26:787–790
Lu B, Piner EL, Palacios T (2010) IEEE Electron Device Lett 31:302–304
Hokelek E, Robinson GY (1981) Solid-State Electron 24
Chand S, Bala S (2007). Physica B 390:179
Calvet LE, Wheeler RG, Reed MA (2002) Appl Phys Lett 80:1761
Schmistdorf RF, Kampen TU, Monch W (1997) J Vac Sci Technol B 15:1221
Mahmood ZH, Shah AP, Kadir A, Gokhale MR, Bhattacharya A, Arora BM (2008) Phys Status Solidi B 245:2567
Mitrofanov O, Manfra M, Weimann N (2002) Appl Phys Lett 82:4361
Zhang AP, Rowland LB, Kaminsky EB, Tilak V, Grande JC, Teetsov J, Vertiatchikh A, Eastman LF (2003) J Electron Mater 32:338
Chikhaoui W, Bluet JM, Girard P, Bremond G, Bru-Chevallier C, Dua C, Aubry R (2009) Physica B 404:4877–4879
Fathallah O, Gassoumi M, Grimbert B, Gaquière C, Maaref H (2010) Eur Phys J Appl Phys 51:1–5
Antoszewski J, Gracey M, Dell J M, Faraone L, Fisher T A, Parish G, Wu Y-F, Mishra U K (2000) J Appl Phys 87:3900–3904
Oberhuber R, Zandler G, Vogl P (1998) Appl Phys Lett 73:818–820
Zhang Y, Singh J (1999) J Appl Phys 85:587–594
Chikhaoui W, Bluet JM, Bru-Chevallier C, Dua C, Aubry R (2010) Phys Status Solidi C 7:92–95
Rhoderick EH, Williams RH (1988) Metal Semiconducteur contacts, 2nd ed. (Clarendon oxford
Kumar V, Selvatanathan D, Kuliev A, Kim S, Flynn J, Adesida I (2003) Electron Lett 39:747
Li F, Zhang X-L, Duan Y, Xie X-S, Lu C.-Z., Chi (2009) Chinese Physics B 18:5029
Zhou Y, Wang D, Ahyi C, Tin CC, Williams J, Park M, Williams NM, Hanser A, Preble EA (2007) J Appl Phys 101:024506
Phark S-H, Kim H, Song KM, Kang PG, Shin HS, Kim D-W, J Phys D Appl Phys (2010) 43:165102
Karatas S, Altindal S, Türüt A, Özmen A (2003) Appl Surf Sci 217:250
Tekeli Z, Altindal S, Cakmak M, Özçelik, Caliskan D, Özbay E (2007) J Appl Phys 102:054510
Chand S, Kumar J (1996) Appl Phys A 63:171
Huang S, Shen B, Xu F-J, Lin F, Miao Z-L, Song J, Lu L, Cen L-B, Sang L-W, Qin Z-X, Yang Z-J, Zhang G-Y (2009) Semicond Sci Technol 24:055005
Roccaforte F, Giannazzo F, Iucolano F, Eriksson J, Weng MH, Raineri V (2010) Appl Surf Sci 256:5727
Charfeddine M, Gassoumi M, Mosbahi H, Gaquiére C, Zaidi MA, Maaref H (2011) J Mod Phys 2:1228–1233
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Jabli, F., Gassoumi, M., Hamadi, N.B. et al. Analysis of Thermal Effects on Electrical Characterization of AlGaN/GaN/Si FAT-HEMTs. Silicon 9, 629–635 (2017). https://doi.org/10.1007/s12633-015-9337-0
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DOI: https://doi.org/10.1007/s12633-015-9337-0