Abstract
SEM is very useful measuring equipment in the micro and nano area. In general, it is not used to accurately measure the size information of a sample, but to measure its shape characteristics. In addition, it has a measuring area that is limited to just several micro-meters, and it is unsuitable for accurate measurements larger than several tens of micro meters. This paper proposed a stitching algorithm for the split electron beam images using an image processing technique to minimize measurement error. Experiments were conducted targeting circular and rectangular shapes 500 nm∼10 μ in diameter and line length. Finally, stitching accuracy was verified through a comparison with AFM measuring data.
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Hong, WP., Lee, SW. & Choi, HZ. A stitching algorithm for measuring large areas using scanning electron microscopes. Int. J. Precis. Eng. Manuf. 14, 147–151 (2013). https://doi.org/10.1007/s12541-013-0020-3
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DOI: https://doi.org/10.1007/s12541-013-0020-3